Monolithic 3D CMOS Using Layered Semiconductors.

نویسندگان

  • Angada B Sachid
  • Mahmut Tosun
  • Sujay B Desai
  • Ching-Yi Hsu
  • Der-Hsien Lien
  • Surabhi R Madhvapathy
  • Yu-Ze Chen
  • Mark Hettick
  • Jeong Seuk Kang
  • Yuping Zeng
  • Jr-Hau He
  • Edward Yi Chang
  • Yu-Lun Chueh
  • Ali Javey
  • Chenming Hu
چکیده

Monolithic 3D integrated circuits using transition metal dichalcogenide materials and low-temperature processing are reported. A variety of digital and analog circuits are implemented on two sequentially integrated layers of devices. Inverter circuit operation at an ultralow supply voltage of 150 mV is achieved, paving the way to high-density, ultralow-voltage, and ultralow-power applications.

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عنوان ژورنال:
  • Advanced materials

دوره 28 13  شماره 

صفحات  -

تاریخ انتشار 2016